AQUABATE (wet) - Point-of-Use Waste Gas Scrubber System
From Waste Gas Treatment
The AQUABATE product line completes DAS´waste gas treatment portfolio. The well proven solution is a pure wet scrubber technology for efficient abatement of water-soluble harmful substances from process waste gases. The gas scrubber is employed mainly in the semiconductor industry, as a Point-of-Use (POU) wet treatment system. Installed closely behind the vacuum pumps, AQUABATE optimally protects the fab’s exhaust gas system from contamination and corrosion. Maintenance is quick and easy with access for operation and maintenance on the front and back sides. Other advantages are the high disposal efficiency, low investment cost and a small footprint. Operation costs can be optimized with a process tool interface.
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The following equipment options are available for ...
The following equipment options are available for all AQUABATE gas scrubber systems:
- Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz
- Heated feed lines and inlets
- Lye metering system
- Process-Tool-Interface
- Signal Tower
- Drip Pan
- Earthquake Safety Kit
- Monitoring
Treatment of Process Waste Gases from Epitaxy with AQUABATE EPI
AQUABATE EPI was specifically designed to treat waste gases of epitaxy processes in the semiconductor industry. The gas scrubber meets the high safety standards that are necessary when using hydrogen as a process carrier gas. After the scrubbing process, the hydrogen is safely diluted to its lower explosion limit (LEL). The waste gases are introduced through up to three separate connections, specifically designed to prevent blockages. Both inlets and feed lines have an optional heating system. To increase washing efficiency the scrubbing liquid can be enhanced optionally with chemicals.
Features
- No Inlet clogging
- Small Footprint
Technical Data
- Dimensions (W x D x H):
- 1020 mm x 930 mm x 1800 mm
- Access to maintenance area on front and back side
- Gas entry: max. 3 x DN40
- Gas outlet: DN40
Modular Gas Scrubbing of Process Waste Gases with AQUABATE FLEX
AQUABATE FLEX is a modular wet scrubber for efficient treatment of water-soluble components from waste gases of different applications. The gas inlets are specifically designed to prevent blockages. AQUABATE FLEX is available as one- or two-stage scrubber. Based on the compact and modular design the gas scrubber will be optimized to customer requirements. Depending on the configuration of the scrubber the gas inlets can be optionally heated up to the scrubber stage or the washing liquid tank in order to avoid problems caused by condensing gas in the waste gas supply. To increase washing efficiency the scrubbing liquid can be enhanced optionally with chemicals.
Features
- Available in 6 Variations
- No inlet clogging
- Small Footprint
Technical Data
- Dimensions (W x D x H):
- 1165 mm x 820 mm x 1944 mm
- Access to maintenance area on front and back side
- Gas entry: max. 4 x DN40 - DN150
- Gas outlet: 2 x DN100 or DN150
Combined Gas Scrubbing of Process Waste Gases for AP/RP-Epitaxy with AQUABATE COMBIBURN
AQUABATE COMBIBURN is a combination of AQUABATE EPI and ESCAPE PLUS technology and is a solution specifically developed to abate waste gases from epitaxy processes (Atmospheric and Reduced Pressure Epitaxy, AP/RP), and which employs the tried and tested ESCAPE technology to burn large amounts of hydrogen while meeting the highest safety standards.
Gas scrubbing takes place in three steps (sample process): The AQUABATE EPI gas scrubber absorbs silicon chloride and HCI. SiH4, GeH4 und H2 combust in the ESCAPE PLUS burner apparatus. In ESCAPE PLUS’ subsequent scrubbing process SiO2 and GeO2 are absorbed. All process waste gases, including hydrogen, are completely abated.
Features
- Both tools are SEMI S2 compliant
- No inlet clogging
- Small Footprint
Technical Data
- Dimensions (W x D x H):
- 1875 mm x 930 mm x 2070 mm
- Access to maintenance area on front and back side
- Gas entry: max. 3 x DN40
- Gas outlet: DN100
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