Centrotherm - Model CT-D - Dry Bed absorber
From Waste Gas Treatment - Dry Gas Treatment
The centrotherm CT-D dry bed absorber offers you a safe and efficient disposal of harmful gases which are used in the semiconductor and photovoltaic industry, without any special demands regarding your media supply. Our CT-D dry bed absorber is a passive system that only requires an electrical supply and CDA or nitrogen.The cartridge, which was specifically designed and patented by centrotherm clean solutions, is available in different sizes with various options and filled with granules based on the individual customer's application.
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Product Details
For specific applications we use one or more different granules, which absorb the toxic, corrosive and / or inflammable products and by-products. Because of the irreversible chemical reaction with the granules at room temperature, the harmful gases are converted into non-volatile, inorganic solids.To ensure a smooth production, we offer all our customers a sophisticated cartridge exchange and granule disposal service.
Highlights
- Low demand on media supply, long granulate lifetime
- Minimal maintenance requirements
- Patented absorber design with cold trap function prevents blockages
- Available as 30 litres, 60 litres or 120 litres absorption module
- Outlet concentrations guaranteed to reach TLV
- Specifically designed granules for various applications
- Chemisorption irreversibly binds hazardous gases to granulate
- Minimum footprint
- Easy and safe cartridge replacement and global refill service available
- Quality Made in Germany
Options
- Fully equipped with endpoint and inlet pressure detection
- Cost-efficient stand-alone system
Applications
- R&D applications
- CVD applications (e.g. MOCVD)
- Etch processes
- ALD processes
- Ion implanters
- CIGS
Industries
- Universities and research institutions
- Semiconductor
- Photovoltaic
- LED-Industry
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