Decima - Model Gemini CD - Inline Non-Contact Bi-Facial System
The Decima Gemini system accurately and reliably performs simultaneous measurement of emitter and back-surface field sheet resistances inline at full production speeds. The sensor uses safe infrared light to produce high-resolution characterization of sheet resistance from edge-to-edge on a wafer.
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Description
The Decima Gemini CD system measures the emitter and back-surface field sheet resistances within crystalline silicon photovoltaic (PV) wafers. This innovative product is the industry’s most accurate and reliable measurement tool that characterizes diffusion and annealing process results. Sheet resistance is measured at a series of discrete points along the centerline of each wafer. Its patented technology provides accurate real-time measurements for process control and optimization.
The system consists of a specialized pair of Decima CD measurement heads, designed as a unit to fit above and below a wafer conveyor, and measures 100 percent of wafers at full production line speeds. Each measuring head connects to Aurora’s Veritas™, a quality control system for measurement integration and operations. Veritas enables optimization of diffusion and annealing processes by providing operators and process engineers with real-time 3D visualization of intra-furnace dynamics, both spatially and by batch.
Features
- Non-contacting continuous sheet resistance measurement
- Both emitter and back-surface field measured simultaneously
- Designed for 100% wafer measurement up to 5000 wafers/hour
- Rock-solid long term measurement stability
- Encoder controlled measurement triggering
- Highly accurate and repeatable
- Compact and easily installed
Benefits
- Allows true characterization of both short and long term furnace behavior
- Eliminates operator error and inconsistencies in offline measurement
- Minimizes wafer damage caused by handling and four-point probe contact measurement
- Reduces labor costs associated with offline sampling and SPC charting
- Rapid payback
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