Intevac ENERGi - Ion Implant System
From Thin Film Equipment - Solar
Intevac ENERGi is an innovative ion implant system specifically designed to meet the cost, efficiency and productivity requirements of solar cell manufacturing. ENERGi, a continuous flux ion source system, offers manufacturers the most cost-effective, production-proven system.
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Intevac ENERGi Benefits
- Single pass under a continuous flux ion source
- Fast beam tuning for dose control and dopant profile
- Excellent dose uniformity and distribution control
- Boron and phosphorous implanting capabilities
ENERGi meets the solar industry efficiency roadmap today and is extensible to enable advanced cell designs and increased efficiency requirements. The platform design allows for excellent serviceability and a small footprint.
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