Semicorex - Liquid Phase Epitaxy (LPE) Reactor System

Our Liquid Phase Epitaxy (LPE) Reactor System is a highly reliable and durable product that provides excellent value for money. Its high-temperature oxidation resistance, even thermal profile, and prevention of contamination make it ideal for high-quality epitaxial layer growth. Its low maintenance requirements and customizability make it a highly competitive product in the market.

At Semicorex, we focus on providing high-quality, cost-effective products to our customers. Our Liquid Phase Epitaxy (LPE) Reactor System has a price advantage and is exported to many European and American markets. We aim to be your long-term partner, delivering consistent quality products and exceptional customer service.

Contact us today to learn more about our Liquid Phase Epitaxy (LPE) Reactor System.

• Both the graphite substrate and silicon carbide layer have good density and can play a good protective role in high temperature and corrosive working environments.
• Silicon carbide coated susceptor used for single crystal growth has a very high surface flatness.
• Reduce the difference in thermal expansion coefficient between the graphite substrate and silicon carbide layer, effectively improve the bonding strength to prevent cracking and delamination.
• Both the graphite substrate and silicon carbide layer have a high thermal conductivity, and excellent heat distribution properties.
• High melting point, high temperature oxidation resistance, corrosion resistance.